Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10044160 | Pulsed light generating method, pulse laser apparatus, exposure apparatus having pulse laser apparatus, and inspection apparatus having pulse laser apparatus | Naoto Inaba | 2018-08-07 |
| 9882340 | Laser device, and exposure device and inspection device provided with the laser device | — | 2018-01-30 |