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Companies
Inventors
AE
Akimitsu Ebihara
NI
Nikon
: 1 patents #100 of 309
Top 35%
Overall (2018):
#497,976
of 503,207
Top 100%
1
Patents 2018
Issued Patents
2018
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Patent #
Title
Co-Inventors
Date
10007188
Exposure apparatus and device manufacturing method
—
2018-06-26
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