Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9892950 | Ceramic member, member for semiconductor manufacturing apparatus, and method for manufacturing ceramic member | Morimichi Watanabe, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda, Atsushi Watanabe | 2018-02-13 |