Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153176 | Manufacturing method of semiconductor device and template for nanoimprint | — | 2018-12-11 |
| 9941137 | Substrate planarizing method and dropping amount calculating method | Kazuhiro Takahata | 2018-04-10 |