Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10042173 | Laser interference lithography system with flat-top intensity profile | Han-Jung Chang | 2018-08-07 |
| 9904176 | Interference lithography device | Wei-Sung Lin | 2018-02-27 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10042173 | Laser interference lithography system with flat-top intensity profile | Han-Jung Chang | 2018-08-07 |
| 9904176 | Interference lithography device | Wei-Sung Lin | 2018-02-27 |