Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10026620 | Method of irradiating ultraviolet light on silicon substrate surface for improving quality of native oxide layer and apparatus using the same | Mao-Nan Chang, Chia-Yi Wu, Chun-Ting Lin, Ming-Hua Shiao | 2018-07-17 |