Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10014200 | Gas injection device and assisting member | Masanao Murata | 2018-07-03 |
| 9997387 | Purge device, purge system, purge method, and control method in purge system | Masanao Murata, Shinji Onishi | 2018-06-12 |
| 9972518 | Gas purge device and gas purge method | Masanao Murata | 2018-05-15 |
| 9878353 | Stocker provided with purging functionality, stocker unit, and method for supplying cleaning gas | Masanao Murata | 2018-01-30 |