Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10026589 | Alignment and registration targets for charged particle beam substrate patterning and inspection | Kevin M. Monahan, Michael C. Smayling, David K. Lam | 2018-07-17 |
| 10020166 | Alignment and registration targets for charged particle beam substrate patterning and inspection | Kevin M. Monahan, Michael C. Smayling, David K. Lam | 2018-07-10 |
| 10020200 | Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays | Kevin M. Monahan, Michael C. Smayling, David K. Lam | 2018-07-10 |
| 9881817 | Precision substrate material multi-processing using miniature-column charged particle beam arrays | David K. Lam, Kevin M. Monahan, Michael C. Smayling | 2018-01-30 |