Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10160938 | Semiconductor element cleaning solution that suppresses damage to tantalum-containing materials, and cleaning method using same | Kenji Shimada | 2018-12-25 |
| 10035978 | Semiconductor element cleaning liquid and cleaning method | Kenji Shimada | 2018-07-31 |