Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10095125 | Measurement apparatus, lithography apparatus, and method of manufacturing article | — | 2018-10-09 |
| 9959482 | Classifying method, storage medium, inspection method, and inspection apparatus | Takanori Uemura | 2018-05-01 |
| 9875873 | Particle charger | Yoshihiro Ueno, Hiroshi Seki | 2018-01-23 |