Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865456 | Methods of forming silicon nitride by atomic layer deposition and methods of forming semiconductor structures | Sumeet C. Pandey, Stefan Uhlenbrock, John Smythe, Timothy A. Quick | 2018-01-09 |