Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10060865 | Measurement of critical dimensions of nanostructures using X-ray grazing incidence in-plane diffraction | Ronald D. Ruth, Roderick J. Loewen | 2018-08-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10060865 | Measurement of critical dimensions of nanostructures using X-ray grazing incidence in-plane diffraction | Ronald D. Ruth, Roderick J. Loewen | 2018-08-28 |