Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156664 | Mask inspection apparatus and mask inspection method | Hiroki MIYAI | 2018-12-18 |
| 9991670 | Laser light source device and inspection device | Jun Sakuma | 2018-06-05 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156664 | Mask inspection apparatus and mask inspection method | Hiroki MIYAI | 2018-12-18 |
| 9991670 | Laser light source device and inspection device | Jun Sakuma | 2018-06-05 |