Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10037883 | Enhanced productivity for an etch system through polymer management | Alfredo Granados, Zhao H. Ceng, Jianqi Wang, Rajan Balesan | 2018-07-31 |
| 9865472 | Fabrication of a silicon structure and deep silicon etch with profile control | Frank Y. Lin, Jaroslaw W. Winniczek, Wan-Lin Chen, Erin Moore, Lily Zheng +3 more | 2018-01-09 |
| 9857307 | Elevated surface enhanced Raman spectroscopy resonator structures and method of making same | Fanqing Frank Chen | 2018-01-02 |