Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147588 | System and method for increasing electron density levels in a plasma of a substrate processing system | Kwame Eason, James Eugene Caron, Joon Hong Park, Dengliang Yang | 2018-12-04 |
| 9911620 | Method for achieving ultra-high selectivity while etching silicon nitride | Helen Zhu, Linda Marquez, Faisal Yaqoob, Pilyeon Park, Ivan L. Berry, III +1 more | 2018-03-06 |