Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9978597 | Method for treating the surface of a silicon-carbide substrate including a removal step in which a modified layer produced by polishing is removed by heating under Si vapor pressure | Tadaaki Kaneko, Noboru Ohtani | 2018-05-22 |
| 9941116 | Method for manufacturing silicon-carbide semiconductor element | Tadaaki Kaneko, Noboru Ohtani | 2018-04-10 |