Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10056248 | Method for measuring overall concentration of oxidizing substances, substrate cleaning method, and substrate cleaning system | — | 2018-08-21 |
| 10032623 | Method and system for cleaning semiconductor substrate | Yuichi Ogawa | 2018-07-24 |
| 10026628 | Semiconductor substrate cleaning method and cleaning system | Yuichi Ogawa | 2018-07-17 |