Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9897724 | Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity | Peter Zink, Christof Metzmacher | 2018-02-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9897724 | Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity | Peter Zink, Christof Metzmacher | 2018-02-20 |