Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966286 | Substrate processing apparatus | Takashi Nogami, Kazuma Yoshioka | 2018-05-08 |
| 9966289 | Substrate processing apparatus, method for manufacturing semiconductor device, and non-transitory computer-readable recording medium | Daigi KAMIMURA, Shigeru Odake, Takashi Nogami, Osamu Morita, Yasuaki Komae | 2018-05-08 |