Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9885656 | Line scan knife edge height sensor for semiconductor inspection and metrology | Shifang Li | 2018-02-06 |
| 9885671 | Miniaturized imaging apparatus for wafer edge | — | 2018-02-06 |