Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10018904 | EUV mask and method for manufacturing same | — | 2018-07-10 |
| 10012896 | Lithography mask production method and lithography mask production system | — | 2018-07-03 |
| 9946150 | Light reflection type lithography mask, its manufacturing method, mask data generation method and mask blank | — | 2018-04-17 |