Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083851 | Robot with inner and outer belt sections | Takahiro Inada, Masayuki Saito, Takeshi Shibata, Takayuki Fukushima | 2018-09-25 |
| 9947566 | Substrate angle alignment device, substrate angle alignment method, and substrate transfer method | — | 2018-04-17 |
| 9929034 | Substrate transfer device | Ming Zeng, Avish Ashok Bharwani, Shigeki Ono | 2018-03-27 |
| 9905446 | Substrate transferring apparatus | — | 2018-02-27 |