Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151972 | Manufacturing method of photomask and recording medium | Satoshi Usui, Naoki Sato, Kouichi Nakayama, Masahiro Miyairi, Syogo Okamoto | 2018-12-11 |
| 10120275 | Layout method of mask pattern, manufacturing method of a semiconductor device and exposure mask | Masakazu Hamasaki, Yoshihiro Yanai, Michiya Takimoto, Naoki Sato, Satoshi Usui | 2018-11-06 |
| 9910363 | Measurement apparatus, exposure apparatus, measurement method, and recording medium | Ai FURUBAYASHI | 2018-03-06 |