Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10100413 | Component for plasma apparatus and method of manufacturing the same | Takashi Hino, Masashi Nakatani | 2018-10-16 |
| 9988702 | Component for plasma processing apparatus and method for manufacturing component for plasma processing apparatus | Takashi Hino, Masashi Nakatani | 2018-06-05 |