Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134612 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | — | 2018-11-20 |
| 10008390 | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus | Yukiteru Matsui, Akifumi GAWASE, Takahiko Kawasaki | 2018-06-26 |