Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10068915 | Manufacturing method for a semiconductor device including resist films different in thickness | Satoshi Nagai, Eiji Yoneda, Kentaro Matsunaga | 2018-09-04 |
| 9972547 | Measurement method, manufacturing method of device, and measurement system | — | 2018-05-15 |