Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9947555 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Takashi Watanabe, Takayuki Nakayama | 2018-04-17 |
| 9902038 | Polishing apparatus, polishing method, and semiconductor manufacturing method | Dai Fukushima | 2018-02-27 |