Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10036091 | Semiconductor manufacturing apparatus and manufacturing method of semiconductor device | — | 2018-07-31 |
| 9920425 | Semiconductor manufacturing apparatus and manufacturing method of semiconductor device | Takayuki Matsui | 2018-03-20 |
| 9920427 | Semiconductor manufacturing apparatus and manufacturing method of semiconductor device | Motoki FUJII, Fumiki Aiso, Ryota Fujitsuka | 2018-03-20 |