Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9890452 | Tantalum sputtering target, method for manufacturing same, and barrier film for semiconductor wiring formed by using target | Kotaro Nagatsu | 2018-02-13 |
| 9859104 | Tantalum sputtering target and production method therefor | Kotaro Nagatsu | 2018-01-02 |