Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120277 | Radiation-sensitive composition and pattern-forming method | Vasiliki Kosma, Jérémy Odent, Hong Xu, Mufei Yu, Emmanuel P. Giannelis +1 more | 2018-11-06 |
| 10108088 | Radiation-sensitive composition and pattern-forming method | — | 2018-10-23 |
| 10048586 | Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound | Yuusuke Asano, Mitsuo Sato, Hiromitsu Nakashima, Yoshifumi Oizumi, Masafumi Hori +3 more | 2018-08-14 |