Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088750 | Acid diffusion control agent, radiation-sensitive resin composition, resist pattern-forming method, compound, and production method | Norihiko Ikeda | 2018-10-02 |
| 9874816 | Radiation-sensitive resin composition and resist pattern-forming method | — | 2018-01-23 |