SM

Shigeyuki Morishita

JE Jeol: 2 patents #1 of 49Top 3%
Overall (2018): #102,955 of 503,207Top 25%
2
Patents 2018

Issued Patents 2018

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10014152 Method of aberration correction and charged particle beam system — 2018-07-03
9892886 Charged particle beam system and method of aberration correction — 2018-02-13