Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162307 | System and method for generating a lithographic image with the use of a reflective concave curvilinear surface and a digital hologram in a diverging beam | Vadim Rakhovsky, Aleksey Shamaev, Dmitry Chelyubeev, Vitaly Chernik, Peter Mikheev | 2018-12-25 |
| 9952516 | System and method for generating a lithographic image with the use of a digital hologram and a reflective concave in curvilinear surface | Vadim Rakhovsky, Aleksey Shamaev, Dmitry Chelyubeev, Vitaly Chernik, Peter Mikheev | 2018-04-24 |