Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9922856 | Electrostatic heating substrate holder which is polarised at high voltage | Laurent Roux | 2018-03-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9922856 | Electrostatic heating substrate holder which is polarised at high voltage | Laurent Roux | 2018-03-20 |