Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153130 | Charged particle beam drawing apparatus and charged particle beam drawing method | — | 2018-12-11 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153130 | Charged particle beam drawing apparatus and charged particle beam drawing method | — | 2018-12-11 |