Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9921486 | Multiscale patterning of a sample with apparatus having both thermo-optical lithography capability and thermal scanning probe lithography capability | Urs T. Duerig, Felix Holzner, Armin W. Knoll | 2018-03-20 |