SS

Shu Satoh

AT Axcelis Technologies: 1 patents #5 of 21Top 25%
📍 Byfield, MA: #2 of 3 inventorsTop 70%
🗺 Massachusetts: #4,566 of 12,682 inventorsTop 40%
Overall (2018): #238,571 of 503,207Top 50%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10024825 Wafer clamp detection based on vibration or acoustic characteristic analysis — 2018-07-17