Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10123379 | Substrate support with quadrants | Soo Young Choi, Beom Soo Park, Shinichi Kurita, Bora Oh, Gaku Furuta | 2018-11-06 |
| 10087524 | Showerhead support structure for improved gas flow | Soo Young Choi, Qunhua Wang, Jrjyan Jerry CHEN | 2018-10-02 |