Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9932671 | Precursor and process design for photo-assisted metal atomic layer deposition (ALD) and chemical vapor deposition (CVD) | Patricio E. Romero, Scott B. Clendenning, Grant Kloster, Florian Gstrein, Harsono S. Simka +2 more | 2018-04-03 |