Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9932668 | Physical vapor deposition system using backside gas cooling of workpieces | Ravi Mullapudi, Harish V. PENMETHSA, Srikanth Dasaradhi, Lee LeBlanc | 2018-04-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9932668 | Physical vapor deposition system using backside gas cooling of workpieces | Ravi Mullapudi, Harish V. PENMETHSA, Srikanth Dasaradhi, Lee LeBlanc | 2018-04-03 |