Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10123379 | Substrate support with quadrants | Robin L. Tiner, Soo Young Choi, Beom Soo Park, Shinichi Kurita, Bora Oh | 2018-11-06 |
| 10002711 | Low temperature multilayer dielectric film for passivation and capacitor | Dapeng Wang, Yixuan Wu, Tae Kyung Won, Beom Soo Park | 2018-06-19 |