Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9953886 | Single-wafer real-time etch rate and uniformity predictor for plasma etch processes | Justin Hiroki Sato, Yannick Carll Kimmel | 2018-04-24 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9953886 | Single-wafer real-time etch rate and uniformity predictor for plasma etch processes | Justin Hiroki Sato, Yannick Carll Kimmel | 2018-04-24 |