Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9879359 | Silicon carbide semiconductor film-forming apparatus and film-forming method using the same | Hiroaki Fujibayashi, Masami Naito, Masahiko Ito, Isaho Kamata, Hidekazu Tsuchida +2 more | 2018-01-30 |
| 9873941 | Film-forming manufacturing apparatus and method | Hideki Ito, Toshiro Tsumori, Kunihiko Suzuki, Hidekazu Tsuchida, Isaho Kamata +4 more | 2018-01-23 |