Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9947531 | High rate sputter deposition of alkali metal-containing precursor films useful to fabricate chalcogenide semiconductors | Dennis R. Hollars, Puthur Paulson, Don Person | 2018-04-17 |