Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10050409 | Microfabricated optical apparatus with grounded metal layer | — | 2018-08-14 |
| 10011478 | Thermocompression bonding with raised feature | Paul J. Rubel | 2018-07-03 |
| 9950923 | Method for making vias using a doped substrate | Jeffery F. Summers | 2018-04-24 |
| 9953787 | Dual substrate electrostatic MEMS switch with multiple hinges and method of manufacture | Paul J. Rubel, Marin Sigurdson | 2018-04-24 |