Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9938140 | MEMS device and method of manufacturing a MEMS device | Alfons Dehe, Bernhard Knott, Carsten Ahrens | 2018-04-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9938140 | MEMS device and method of manufacturing a MEMS device | Alfons Dehe, Bernhard Knott, Carsten Ahrens | 2018-04-10 |