Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9938133 | System and method for a comb-drive MEMS device | Thoralf Kautzsch, Alfons Dehe, Heiko Froehlich, Alessia Scire, Steffen Bieselt | 2018-04-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9938133 | System and method for a comb-drive MEMS device | Thoralf Kautzsch, Alfons Dehe, Heiko Froehlich, Alessia Scire, Steffen Bieselt | 2018-04-10 |