Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10061190 | Mask for extreme ultraviolet lithography process and method of fabricating the same | Jung Sik Kim, Seongchul Hong, Hyun Min Song, Jae Uk Lee, Seung Min Lee +1 more | 2018-08-28 |
| 9958770 | Pellicle for EUV lithography | Jaeuk LEE, Seongchul Hong, Seungmin LEE, Kilbock Lee, Jungsik Kim +1 more | 2018-05-01 |