Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10107681 | Tube-type lens, optical emission spectroscopy (OES) apparatus including the tube-type lens, plasma monitoring system including the OES apparatus, and method of manufacturing semiconductor device by using the plasma monitoring system | In-Joong Kim | 2018-10-23 |