Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157486 | Deformation field calculation apparatus, method, and computer readable storage medium | Itaru Otomaru, Kiyohide Satoh | 2018-12-18 |
| 10121674 | Method for etching silicon layer and plasma processing apparatus | Akinori Kitamura | 2018-11-06 |